Conceptual Design of Alkali Metal Ion Implanter

KOMAC is developing alkali ion implanters to provide alkaline ion beams such as sodium and potassium that can be used in surface physics such as research on superconductivity phenomena. As the ion source, the Bernas ion source, which has previously provided a metal beam such as iron or copper, is used, and only the ions having the desired mass and charge are separated by the mass separation electromagnet. The ion beams are then accelerated once again to obtain the desired energy and then irradiated to the sample. The conceptual design has been carried out to provide alkali ions such as sodium and potassium by using the Bernas ion source. Chloride is used as the ionizing material, and the crucible heating is performed by direct heating in which electric current is supplied to the crucible. The ion species is separated by a 90° bending magnet and the desired ion is then accelerated to irradiate the sample.