Published March 15, 2003
| Version v1
Journal article
New results in pulsed laser deposition of poly-methyl-methacrylate thin films
Description
Thin organic films based on poly-methyl-methacrylate (PMMA) polymer have been obtained by pulsed laser deposition (PLD) on silicon substrates. The films were characterized by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM) and Raman spectroscopy (RS). We observed that the film composition and structure depend on the laser fluence and on the temperature of the substrate during deposition
Additional details
Identifiers
- DOI
- 10.1016/S0169-4332(02)01415-0;
- arXiv
- arXiv:hep-ph/0109183v4;
- PII
- S0169433202014150;
Publishing Information
- Journal Title
- Applied Surface Science
- Journal Volume
- 208-209
- Journal Issue
- 1
- Journal Page Range
- p. 645-650
- ISSN
- 0169-4332
- CODEN
- ASUSEE
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 38086441
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ATOMIC FORCE MICROSCOPY; ENERGY BEAM DEPOSITION; LASER RADIATION; PMMA; PULSED IRRADIATION; RAMAN SPECTROSCOPY; SILICON; THIN FILMS; X-RAY DIFFRACTION; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- COHERENT SCATTERING; DEPOSITION; DIFFRACTION; ELECTROMAGNETIC RADIATION; ELECTRON SPECTROSCOPY; ELEMENTS; ESTERS; FILMS; IRRADIATION; LASER SPECTROSCOPY; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PHOTOELECTRON SPECTROSCOPY; POLYACRYLATES; POLYMERS; POLYVINYLS; RADIATIONS; SCATTERING; SEMIMETALS; SPECTROSCOPY; SURFACE COATING
Optional Information
- Copyright
- Copyright (c) 2002 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.