Published 2001
| Version v1
Book
Effects of radiation on micromachined devices : having SOS structures
Creators
- 1. Department of Electrical Engineering, Indian Institute of Technology Madras, Chennai (India)
Description
The Bulk Micro-machining, Surface Micro-machining and silicon fusion bonding micro-machining processes required for micro engineering and for the successful realization of Micro Electro Mechanical Systems (MEMS) on silicon are presented along with some of the micro machined device structures such as accelerometers. The effects of radiation on such micro-machined devices are next discussed and the need for a detailed study is brought out. (author)
Additional details
Publishing Information
- Publisher
- Mangalore University
- Imprint Place
- Mangalagangotri (India)
- Imprint Title
- Proceedings of BRNS sponsored workshop for microtron users
- Imprint Pagination
- 158 p.
- Journal Page Range
- p. 35-51
Conference
- Title
- Workshop for microtron users
- Dates
- 24-25 Oct 2001
- Place
- Mangalagangotri (India)
INIS
- Country of Publication
- India
- Country of Input or Organization
- India
- INIS RN
- 35086386
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ACCELEROMETERS; BORON; DOPED MATERIALS; ELECTRON BEAM MACHINING; ETCHING; FABRICATION; PHYSICAL RADIATION EFFECTS; SILICON
- Descriptors DEC
- ELEMENTS; MACHINING; MATERIALS; MEASURING INSTRUMENTS; RADIATION EFFECTS; SEMIMETALS; SURFACE FINISHING
Optional Information
- Notes
- 16 refs., 8 figs.