Published January 2022 | Version v1
Journal article Metadata-only

Nitrogen atom density measurements in NAGDIS-T using vacuum ultraviolet absorption spectroscopy

Creators

  • 1. Nagoya University, Graduate School of Engineering, Nagoya, Aichi (Japan)
  • 2. Nagoya University, Institute of Materials and Systems for Sustainability, Nagoya, Aichi (Japan)
  • 3. Nagoya University, Center for Low-Temperature Plasma Sciences, Nagoya, Aichi (Japan)

Description

For the development of a high nitrogen atom density source, we produced nitrogen plasmas and measured the nitrogen atom density using vacuum ultraviolet absorption spectroscopy (VUVAS) at high neutral gas pressure (>1.5 mTorr) and discharge power (>500 W) in the NAGDIS-T, which could generate spiral-shaped dissociative recombining plasmas. It was seen that the nitrogen atom density increases with increasing neutral gas pressure and discharge power, and it reached 6.2 × 1017 m−3. In the low gas pressure case, the estimated atom density was confirmed to be consistent with that measured by the actinometry method. (author)

Availability note (English)

Available from DOI: https://doi.org/10.1585/pfr.17.1201004

Additional details

Identifiers

DOI
10.1585/pfr.17.1201004;

Publishing Information

Journal Title
Plasma and Fusion Research
Journal Volume
17
Journal Page Range
p. 1201004.1-1201004.3
ISSN
1880-6821

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
54073464
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
ABSORPTION SPECTROSCOPY; ELECTRIC CURRENTS; ELECTRON DENSITY; ELECTRON TEMPERATURE; LIGHT SOURCES; MAGNETIC FIELDS; NITROGEN IONS; NITROGEN OXIDES; PHOTOMULTIPLIERS; PLASMA DENSITY; PLASMA PRODUCTION; ULTRAVIOLET RADIATION
Descriptors DEC
CHALCOGENIDES; CHARGED PARTICLES; CURRENTS; ELECTROMAGNETIC RADIATION; IONS; NITROGEN COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHOTOTUBES; RADIATION SOURCES; RADIATIONS; SPECTROSCOPY

Optional Information

Notes
8 refs., 2 figs.