Published June 1996 | Version v1
Journal article

Development of high-dose and high-energy ion implantation

  • 1. Beijing Univ. (China). Inst. of Heavy Ion Physics

Description

The development of high-dose ion implantation and high-energy ion implantation at the Ion Beam Application Group of IHIP in recent years is reviewed

Additional details

Publishing Information

Journal Title
Trends in Nuclear Physics
Journal Volume
13
Journal Issue
2
Series
Special Issue for Institute of Heavy Ion Physics of Beijing University.
Journal Page Range
p. 47-49.
ISSN
1003-9988
CODEN
HEDOEW

INIS

Country of Publication
China
Country of Input or Organization
China
INIS RN
28020514
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
DOSE RATES; ENERGY RANGE; ION BEAMS; ION IMPLANTATION; PHYSICAL RADIATION EFFECTS; REVIEWS; TARGETS
Descriptors DEC
BEAMS; DOCUMENT TYPES; RADIATION EFFECTS