Published October 1986
| Version v1
Journal article
Simple low-energy sputter ion gun based on a Bayard--Alpert pressure gauge
Creators
- 1. Institut fuer Grenzflaechenforschung und Vakuumphysik, Kerforschungsanlage Juelich, Postfach 1913, D-5170 Juelich, Federal Republic of Germany
Description
The design and performance of a simple sputter ion gun is given. It uses a commercial Bayard--Alpert ionization gauge. A two-stage extraction and acceleration system provides a variable beam profile as well as high currents at low energies (>1 μA above 200 eV). At a distance of 4 cm from the end of the gun a current density of more than 150 μA/cm2 was obtained at 1.2 keV. A narrow energy distribution may also be obtained (≤1.6 eV FWHM at 1.2 keV)
Additional details
Publishing Information
- Journal Title
- Rev. Sci. Instrum.
- Journal Volume
- 57
- Journal Issue
- 10
- Series
- Rev. Sci. Instrum.
- Journal Page Range
- 2640-2642
- ISSN
- 0034-6748
- CODEN
- RSINA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 18015663
- Subject category
- S74: ATOMIC AND MOLECULAR PHYSICS;
- Descriptors DEI
- ACCELERATION; BAYARD-ALPERT GAGES; BEAM PROFILES; CURRENT DENSITY; ELECTRODES; ENERGY SPECTRA; ION BEAMS; ION SOURCES; KEV RANGE 01-10; PERFORMANCE; SPECIFICATIONS; SPUTTERING
- Descriptors DEC
- BEAMS; ENERGY RANGE; IONIZATION GAGES; KEV RANGE; MEASURING INSTRUMENTS; PRESSURE GAGES; SPECTRA; VACUUM GAGES