Published December 15, 2004 | Version v1
Journal article

Simulation of suppression of floating-body effect in partially depleted SOI MOSFET using a Si1-x Ge x dual source structure

  • 1. Research Center of Functional Semiconductor Film Engineering and Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, 200050 Shanghai (China)
  • 2. Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong (China)

Description

The effect of the Si1-x Ge x source with an underlying p+ region on the suppression of the floating body effects in a partially depleted silicon-on-insulator (SOI) metal oxide silicon field effect transistor (MOSFET) is numerically investigated. Compared to a conventional SOI MOSFET, the kink effect and anomalous sub-threshold slope are reduced and the breakdown voltage is substantially increased. The detailed suppression mechanism is also studied. Our results suggest that the narrow bandgap Si1-x Ge x source and buried p+ region are favorable to the dispersion of holes generated by impact ionization

Additional details

Identifiers

DOI
10.1016/j.mseb.2004.07.070;
PII
S0921-5107(04)00300-9;

Publishing Information

Journal Title
Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
Journal Volume
114-115
Journal Page Range
p. 264-268
ISSN
0921-5107
CODEN
MSBTEK

Conference

Title
Symposium B: Material science issues in advanced CMOS source-drain engineering
Acronym
EMRS spring meeting 2004
Dates
24-28 May 2004
Place
Strasbourg (France)

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
37114331
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ELECTRIC POTENTIAL; GERMANIUM SILICIDES; HOLES; IONIZATION; METALS; MOSFET; OXIDES; SILICON; SIMULATION
Descriptors DEC
CHALCOGENIDES; ELEMENTS; FIELD EFFECT TRANSISTORS; GERMANIUM COMPOUNDS; MOS TRANSISTORS; OXYGEN COMPOUNDS; SEMICONDUCTOR DEVICES; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; TRANSISTORS

Optional Information

Copyright
Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.