Published December 15, 2004
| Version v1
Journal article
Simulation of suppression of floating-body effect in partially depleted SOI MOSFET using a Si1-x Ge x dual source structure
- 1. Research Center of Functional Semiconductor Film Engineering and Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, 200050 Shanghai (China)
- 2. Department of Physics and Materials Science, City University of Hong Kong, Tat Chee Avenue, Kowloon, Hong Kong (China)
Description
The effect of the Si1-x Ge x source with an underlying p+ region on the suppression of the floating body effects in a partially depleted silicon-on-insulator (SOI) metal oxide silicon field effect transistor (MOSFET) is numerically investigated. Compared to a conventional SOI MOSFET, the kink effect and anomalous sub-threshold slope are reduced and the breakdown voltage is substantially increased. The detailed suppression mechanism is also studied. Our results suggest that the narrow bandgap Si1-x Ge x source and buried p+ region are favorable to the dispersion of holes generated by impact ionization
Additional details
Identifiers
- DOI
- 10.1016/j.mseb.2004.07.070;
- PII
- S0921-5107(04)00300-9;
Publishing Information
- Journal Title
- Materials Science and Engineering. B, Solid-State Materials for Advanced Technology
- Journal Volume
- 114-115
- Journal Page Range
- p. 264-268
- ISSN
- 0921-5107
- CODEN
- MSBTEK
Conference
- Title
- Symposium B: Material science issues in advanced CMOS source-drain engineering
- Acronym
- EMRS spring meeting 2004
- Dates
- 24-28 May 2004
- Place
- Strasbourg (France)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37114331
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ELECTRIC POTENTIAL; GERMANIUM SILICIDES; HOLES; IONIZATION; METALS; MOSFET; OXIDES; SILICON; SIMULATION
- Descriptors DEC
- CHALCOGENIDES; ELEMENTS; FIELD EFFECT TRANSISTORS; GERMANIUM COMPOUNDS; MOS TRANSISTORS; OXYGEN COMPOUNDS; SEMICONDUCTOR DEVICES; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; TRANSISTORS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.