Design of a compact Electron Cyclotron Resonance (ECR) ion source

An indigenous compact 2.45 GHz, 2000 Watt, CW Electron Cyclotron Resonance (ECR) ion source has been designed by using WR340 wave guide section. The ion source uses microwave heating and simple permanent magnet ring structure for producing plasma instead of more complex electromagnetic and permanent magnet structure that are generally used. This ECR source will be efficient and cost effective system for producing singly charged ions. In order to increase the density of the plasma and hence increase the ion intensity output, the size and material of the plasma chamber is optimized. A dielectric window is used as a vacuum seal between the microwave source and plasma chamber. A 2 mm boron nitride disc is used to protect the dielectric window from back streaming electrons. The overall size of the source is approximately 100 mm diameter and 100 mm long with extraction aperture of 6 mm. The major components of the ECR ion source are: microwave system, magnet system, plasma chamber and vacuum system. The aim is to produce 50 mA CW ion beams at 50 kV extraction voltage. This source will be used for ion irradiation and as an ion source for a neutron generator. The design detail will be presented. (author)