Published January 2012 | Version v1
Journal article Metadata-only

Structure and phase composition of ion-plasma Al-Si-N coatings

Creators

  • 1. Physical-Engineering Institute of NAS of Belarus, Minsk (Belarus)
  • 2. Belarusian state univ., Minsk (Belarus)

Description

Al-Si and Al-Si-N coatings were formed by vacuum electric arc deposition using three-component cathode. The constant of Al, Si elements in coatings correlates with the one in the cathode used. The structure of Al-Si coating is a fine crystalline with Ti precipitates. The phase composition of Al-Si-N coating consists of phases of Al, Si, AlN, Si3N and Al4Si. (authors).

Additional details

Additional titles

Original title (Russian)
Структура и фазовый состав ионно-плазменных покрытий Ал-Си-Н

Publishing Information

Journal Title
Vestsi Natsyyanal'naj Akadehmii Navuk Belarusi. Seryya Fizika-Tehkhnichnykh Navuk
Journal Volume
1
Journal Page Range
p. 17-21
ISSN
1561-8358

INIS

Country of Publication
Belarus
Country of Input or Organization
Belarus
INIS RN
44093293
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ALUMINIUM; ALUMINIUM NITRIDES; ALUMINIUM SILICIDES; CATHODES; COATINGS; DEPOSITION; ELECTRIC ARCS; NITROGEN; PLASMA; SILICON; SILICON NITRIDES; VACUUM COATING
Descriptors DEC
ALUMINIUM COMPOUNDS; CURRENTS; DEPOSITION; ELECTRIC CURRENTS; ELECTRIC DISCHARGES; ELECTRODES; ELEMENTS; METALS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES; SEMIMETALS; SILICIDES; SILICON COMPOUNDS; SURFACE COATING

Optional Information

Notes
10 refs., 1 tab., 3 figs.