Synthesis of Intermetallic Phases in the Nb–Cd and Mo–Cd Systems by Ion-Plasma Sputtering and Atomic Layer Deposition of Metals in Vacuum

Abstract

: Niobium and molybdenum dicadmides (NbCd₂ and MoCd₂) have been synthesized using ion-plasma sputtering and codeposition of ultrafine niobium and cadmium or molybdenum and cadmium particles on unheated substrates at a Cd concentration near 66 at % in the film, without initiating reactions leading to the formation of these compounds. Their composition, structure, and unit-cell parameters have been determined by X-ray diffraction and transmission electron microscopy. The synthesized niobium and molybdenum dicadmides can be described by tetragonal unit cells with parameters a = 0.84357 nm and c = 0.54514 nm for the former and a = 0.78231 nm and c = 0.77039 nm for the latter, in which pairs of cadmium atoms reside on lateral faces.