Time-dependent global modeling of pulse-power-modulated low pressure oxygen plasmas

A time-dependent global model, which consists of energy and particle balance equations, is formulated for a pulse-power-modulated low pressure oxygen discharge plasma. The time evolution of the electron temperature and the plasma density are calculated. Also, the time-resolved charged particle density and flux are obtained by changing the duty ratio, the modulation frequency, the pressure, and the input power. The effects of pressure and power are checked with the scaling relations derived based on a global balance. The peak negative-ion density in the afterglow increases with the modulation frequency and the input power, decreases with the duty ratio, and shows a maximum with pressure