Published October 7, 2004 | Version v1
Journal article Metadata-only

Precipitation of superstructured nano-crystals in high-dose implanted Si: an XHRTEM study

Creators

  • 1. Department of Energetica, University 'La Sapienza' and INFM UdR ROMA1, via A. Scarpa, 14-16 00161 Rome (Italy)
  • 2. Institute of Solid State Physics, Bulgarian Academy of Sciences, Tzarigradsko Chausee, 72-1784 Sofia (Bulgaria)
  • 3. Dipartimento di Scienza dei Materiali, University of Lecce and INFM, via per Arnesano, 73100 Lecce (Italy)

Description

Nano-sized precipitation in high-dose implanted Si has been investigated using high-resolution transmission electron microscopy of cross-sectional specimens (XHRTEM). Zn and Bi (50 keV) have been implanted in Si at doses of 5 x 1016 cm-2 and 1016 cm-2, respectively. In spite of the different diffusivities of these species in Si, their low solubility resulted in precipitation of nano-sized metallic inclusions whose inner structures revealed a synthesis of superlattices, composed of the host Si matrix and the implanted species

Availability note (English)

Available online at http://stacks.iop.org/0022-3727/37/2730/d4_19_018.pdf or at the Web site for the Journal of Physics. D, Applied Physics (ISSN 1361-6463) http://www.iop.org/

Additional details

Identifiers

URL
http://stacks.iop.org/0022-3727/37/2730/d4_19_018.pdf; http://www.iop.org/;
DOI
10.1088/0022-3727/37/19/018;
PII
S0022-3727(04)76038-6;

Publishing Information

Journal Title
Journal of Physics. D, Applied Physics
Journal Volume
37
Journal Issue
19
Journal Page Range
p. 2730-2736
ISSN
0022-3727
CODEN
JPAPBE

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36037282
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
BISMUTH IONS; CRYSTALS; KEV RANGE; NANOSTRUCTURES; PRECIPITATION; RESOLUTION; SILICON; SOLUBILITY; SUPERLATTICES; TRANSMISSION ELECTRON MICROSCOPY; ZINC IONS
Descriptors DEC
CHARGED PARTICLES; ELECTRON MICROSCOPY; ELEMENTS; ENERGY RANGE; IONS; MICROSCOPY; SEMIMETALS; SEPARATION PROCESSES