Published February 1992
| Version v1
Journal article
Scanning SCANIIR (surface composition analysis by neutral and ion impact radiation) microscope
- 1. Toyohashi Univ. of Technology, Aichi (Japan)
Description
A scanning SCANIIR (surface composition analysis by neutral and ion impact radiation) microscope for lateral and in-depth composition analysis of insulators has been developed, employing a photon counting technique with a ratemeter. The spatial resolution of this system was estimated to be about 30 μm by observing Cu(I) 324.8-nm photon images of a 200-mesh circular-type Cu grid. The depth profile of a SiO2/Si interface was depicted using a Si(I) 288.2-nm photon, which yields in-depth resolution of approximately 40 nm. (author)
Additional details
Publishing Information
- Journal Title
- Japanese Journal of Applied Physics. Part 2, Letters
- Journal Volume
- 31
- Journal Issue
- 2,B
- Series
- Jpn. J. Appl. Phys., Part 2 Lett.
- Journal Page Range
- L200-L202
- ISSN
- 0021-4922
- CODEN
- JAPLD
INIS
- Country of Publication
- Japan
- Country of Input or Organization
- Japan
- INIS RN
- 23074126
- Subject category
- S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
- Descriptors DEI
- ARGON IONS; ELECTRICAL INSULATORS; ELECTRON EMISSION; ION BEAMS; IRRADIATION; MICROANALYSIS; PHOTON EMISSION; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION; STRUCTURAL CHEMICAL ANALYSIS; SURFACES
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; ELECTRICAL EQUIPMENT; ELECTRON MICROSCOPY; EMISSION; EQUIPMENT; IONS; MICROSCOPY