Published 1976 | Version v1
Report Metadata-only

Selective sputtering of semiconductors under the effect of atomic gases

Creators

  • 1. Zaporozhskij Mashinostroitel'nyj Inst. (Ukrainian SSR)

Description

no abstract available

Additional details

Additional titles

Original title (Russian)
Селективное распыление полупроводнуков под действием атомарных газов

Publishing Information

Imprint Title
The nuclear particles interaction with solid surface. Pt. 1
Imprint Pagination
p. 166-169.
Report number
INIS-mf--3509

Conference

Title
4. all-union conference on nuclear particles interaction with solid surface.
Dates
7 - 9 Jun 1976.
Place
Kharkov, Ukrainian SSR.

INIS

Country of Publication
USSR
Country of Input or Organization
USSR
INIS RN
8311514
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ATOMIC BEAMS; DEFORMATION; DISLOCATIONS; ETCHING; GALLIUM ARSENIDES; GERMANIUM; HYDROGEN; MONOCRYSTALS; RECOMBINATION; SPUTTERING; SURFACES; ZINC SULFIDES
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; BEAMS; CHALCOGENIDES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; CRYSTALS; ELEMENTS; GALLIUM COMPOUNDS; INORGANIC PHOSPHORS; LINE DEFECTS; METALS; NONMETALS; PHOSPHORS; SULFIDES; SULFUR COMPOUNDS; SURFACE FINISHING; ZINC COMPOUNDS

Optional Information

Notes
3 refs.; 4 figs.; published in summary form only. Imprint:Vzaimodejstvie atomnykh chastits s tverdym telom. Chast' 1.