High-resolution transmission and scanning electron microscopy of nanostructured coatings nonstoichiometric cubic titanium nitride

We present new results on the nanostructure of superhard coatings of non-stoichiometric titanium nitride by transmission and scanning electron microscopy. The coatings obtained by vacuum-arc method, with application to a substrate pulse bias potential in a unidirectional growth on the mechanism of 'plasma-solid.' The coatings had a two-tier structure. The microstructure of coatings are tapered columnar with well-defined structure (111). The method of high-resolution electron microscopy for the first time revealed that the nanoscale structure of the coatings is a blast. Domain Sizes ranged 2-10 nm.