Characterisation of lanthanum lithium titanate thin films deposited by radio frequency sputtering on [100]-oriented MgO substrates

Highly textured and insulating LizLa2/3±yTiO3-δ (δ≤1) thin films with structurally incorporated lithium, have been deposited for the first time onto MgO[100] substrates by radio frequency magnetron sputtering in an Ar/O2 mixture. The chemical compositions of the films have been determined by Rutherford backscattering spectrometry and nuclear reaction analysis. The influence of the deposition conditions on the composition, the structure and the microstructure of the films have been analysed by X-ray diffraction, X-ray quantitative texture analysis and transmission electron microscopy, and their hetero-epitaxial growth modes are described