Published October 1987 | Version v1
Journal article

Calculation of free range of electrons in carbon, silicon and germanium

  • 1. AN SSSR, Moscow. Inst. Obshchej i Neorganicheskoj Khimii

Description

Total cross sections of electron scattering on carbon, silicon and germaniium atoms were calculated. The inelastic mean free paths of electrons with kinetic energies ε ∼ 1 keV in surfaces of insulators and semiconductors can be calculated with good accuracy in atomic approximation. The mean free paths obtained are useful for the refinement of the concentration analysis of surfaces by the method of electron spectroscopy

Additional details

Additional titles

Original title (Russian)
Расчет длин свободного пробега электронов в углероде, кремнии и германии

Publishing Information

Journal Title
Poverkhn.: Fiz., Khim., Mekh.
Journal Issue
no.10
Series
Poverkhn.: Fiz., Khim., Mekh.
CODEN
PFKMD