The Use of Trolley Conveyer Made from Plywood and Stainless Steel for Electron Beam Irradiation of Silicon Wafer

Silicon wafer has been commercially irradiated in Electron Beam Irradiation Centre (ALURTRON) since 2014. The use of trolley conveyer made of wood has caused some problems in terms of operation time and cost. A total of 9 batches silicon wafer products have been irradiated with ∼100 kGy electron beam with parameter of 3 MeV, 2 mA and 0.89 m/min speed. The temperature condition during irradiation received by the product was ascertained at below 75 degree Celsius. The results showed that the average dose received for plywood was 100.1 kGy and for stainless steel was 100 kGy. The temperature of silicon wafer products during irradiation was constant at 54 degree Celsius for both trolleys for all batches. There was no significant different between dose and temperature during irradiation. Based on this study the backscattering effect between plywood and stainless steel conveyer was almost the same and no significant different was encountered. Changing the trolley conveyer material from plywood to stainless steel is advisable as it will save time and cost, hygienic, reliable and easy for product handling compared to plywood. (author)