Published April 30, 1998
| Version v1
Journal article
Laser-plasma synthesis of diamond films
Creators
- 1. Natural Science Center, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
- 2. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
Description
A novel technique for plasma synthesis of diamond films (and in future of other materials) with the aid of a stationary optical discharge in flowing mixtures of reactant gases was proposed and experimentally implemented. The use of a cw CO2 laser of 2.5 kW power acting on an Xe - H2 - CH4 gaseous mixture, in an atmospheric-pressure reactor developed for the purpose, made it possible to achieve diamond film deposition rates of 30-50 μm h-1 on an area of 1 cm2. The characteristic features and advantages of this laser-plasma deposition technique are discussed. (letters to the editor)
Availability note (English)
Available from http://dx.doi.org/10.1070/QE1998v028n04ABEH001212Additional details
Identifiers
Publishing Information
- Journal Title
- Quantum Electronics (Woodbury, N.Y.)
- Journal Volume
- 28
- Journal Issue
- 4
- Journal Page Range
- p. 281-282
- ISSN
- 1063-7818
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 42035026
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ATMOSPHERIC PRESSURE; CARBON DIOXIDE LASERS; DEPOSITION; DIAMONDS; HYDROGEN; METHANE; PLASMA; THIN FILMS; XENON
- Descriptors DEC
- ALKANES; CARBON; ELEMENTS; FILMS; FLUIDS; GAS LASERS; GASES; HYDROCARBONS; LASERS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; RARE GASES