Published April 30, 1998 | Version v1
Journal article

Laser-plasma synthesis of diamond films

  • 1. Natural Science Center, A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)
  • 2. A.M. Prokhorov General Physics Institute, Russian Academy of Sciences, Moscow (Russian Federation)

Description

A novel technique for plasma synthesis of diamond films (and in future of other materials) with the aid of a stationary optical discharge in flowing mixtures of reactant gases was proposed and experimentally implemented. The use of a cw CO2 laser of 2.5 kW power acting on an Xe - H2 - CH4 gaseous mixture, in an atmospheric-pressure reactor developed for the purpose, made it possible to achieve diamond film deposition rates of 30-50 μm h-1 on an area of 1 cm2. The characteristic features and advantages of this laser-plasma deposition technique are discussed. (letters to the editor)

Availability note (English)

Available from http://dx.doi.org/10.1070/QE1998v028n04ABEH001212

Additional details

Publishing Information

Journal Title
Quantum Electronics (Woodbury, N.Y.)
Journal Volume
28
Journal Issue
4
Journal Page Range
p. 281-282
ISSN
1063-7818

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
42035026
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ATMOSPHERIC PRESSURE; CARBON DIOXIDE LASERS; DEPOSITION; DIAMONDS; HYDROGEN; METHANE; PLASMA; THIN FILMS; XENON
Descriptors DEC
ALKANES; CARBON; ELEMENTS; FILMS; FLUIDS; GAS LASERS; GASES; HYDROCARBONS; LASERS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; RARE GASES