Features of fused silica ablation by laser induced carbon microplasma

The features of surface structuring on the transparent material by laser-induced microplasma were studied and the intensity of its microplasma was measured. The formation of micro-relief by a series of nanosecond pulsed laser induced carbon microplasma in confinement mode on the surface of fused silica were investigated and the measured intensity was compared with the features of micro-relief. The dependence of depth of formed relief and track on the laser regime was determined. It is shown that the mechanism of microstructure formation is dependent on multifactor and associated with the ablation on the surface of fused silica by the microplasma, which exists quite long time after the pulses.