High-energy ion tracks in polyimide. 3. A study on etching, track structure, and pore shape of polyimide track membranes

Processes of pore formation in polyimide films as a result of their irradiation by high-energy ions of argon, krypton and tungsten and subsequent treatment of irradiated films in concentrated hydrogen peroxide have been studied, the results are presented. Dimensions of fracture area, as well as zone of polymer formation with the changed structure and increased chemical resistance have been evaluated. Polyimide etching rate along the tracks is determined, etching selectively being considered. 14 refs., 5 figs., 1 tab