Mathematical model of the process of niobium production from gaseous phase

Quadratic equations of regression have been set up which describe the interconnection between the specific velocity of niobium deposition and yield as well as a temperature of a substrate, NbCl5 and hydrogen consumption. A canonical form of regression equations as well as a response surface type have been determined. Regression equations for optimum have been studied with a Ridge-analysis method. A combined compromise solution of the equations with a ''random search'' method has been performed. The results of the calculation data experimental check have been presented