Published June 15, 1981 | Version v1
Report Restricted

Reflection/transmission phase shift interferometer and viewing optics

Creators

Description

The interferometer and viewing optics that are the main optical components of an Automated Surface Mapping system (ASM) used to characterize the surface topography and the wall thickness uniformity of opaque and transparent spherical shells is described. To characterize surface finish or wall thickness of spherical shells with an accuracy of 10 nm and a resolution of 1 μm the differential phase shift between two beams of orthogonal polarizations is measured, before and after the probe beam has interacted with the test object

Availability note (English)

MF available from INIS under the Report Number; Available from NTIS., PC A02/MF A01.

Files

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Additional details

Publishing Information

Imprint Pagination
25 p.
Report number
UCRL--85281

Conference

Title
Conference on lasers and electro-optics.
Dates
10 - 12 Jun 1981.
Place
Washington, DC, USA.

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
12637365
Subject category
S37: INORGANIC, ORGANIC, PHYSICAL AND ANALYTICAL CHEMISTRY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
INSPECTION; INTERFEROMETRY; LASERS; OPTICAL SYSTEMS; REFLECTION; SHELLS; SPHERICAL CONFIGURATION; TARGETS; THICKNESS
Descriptors DEC
AMPLIFIERS; CONFIGURATION; DIMENSIONS

Optional Information

Secondary number(s)
CONF-810613--9.