Holmium hafnate: An emerging electronic device material
Creators
- 1. Department of Physics and Institute for Functional Nanomaterials, University of Puerto Rico, P.O. Box 70377, San Juan, Puerto Rico 00936-8377 (United States)
- 2. Department of Physics, Cavendish Laboratory, University of Cambridge, Cambridge CB3 OHE (United Kingdom)
Description
We report structural, optical, charge transport, and temperature properties as well as the frequency dependence of the dielectric constant of Ho2Hf2O7 (HHO) which make this material desirable as an alternative high-k dielectric for future silicon technology devices. A high dielectric constant of ∼20 and very low dielectric loss of ∼0.1% are temperature and voltage independent at 100 kHz near ambient conditions. The Pt/HHO/Pt capacitor exhibits exceptionally low Schottky emission-based leakage currents. In combination with the large observed bandgap Eg of 5.6 eV, determined by diffuse reflectance spectroscopy, our results reveal fundamental physics and materials science of the HHO metal oxide and its potential application as a high-k dielectric for the next generation of complementary metal-oxide-semiconductor devices
Additional details
Identifiers
- DOI
- 10.1063/1.4915503;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 106
- Journal Issue
- 11
- Journal Page Range
- p. 112902-112902.5
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 46101457
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- CAPACITORS; CHARGE TRANSPORT; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTRONIC EQUIPMENT; ENERGY GAP; EV RANGE; FREQUENCY DEPENDENCE; HAFNIUM OXIDES; HOLMIUM COMPOUNDS; KHZ RANGE; LEAKAGE CURRENT; PERMITTIVITY; POTENTIALS; RELAXATION LOSSES; SEMICONDUCTOR DEVICES; SILICON; SPECTRAL REFLECTANCE
- Descriptors DEC
- CHALCOGENIDES; CURRENTS; DIELECTRIC PROPERTIES; ELECTRIC CURRENTS; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; ELEMENTS; ENERGY LOSSES; ENERGY RANGE; EQUIPMENT; FREQUENCY RANGE; HAFNIUM COMPOUNDS; LOSSES; MATERIALS; OPTICAL PROPERTIES; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RARE EARTH COMPOUNDS; REFRACTORY METAL COMPOUNDS; SEMIMETALS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2015 AIP Publishing LLC