Structure formation of molybdenum coatings under vacuum-plasma deposition

Dependences of structural characteristics of Mo condensates, deposited from vacuum arc plasma, on substrate accelerating potential, sputtering temperature range and substrate chemical nature are studied. The main coating structure types are determined, it is shown that structure formation takes place under simultaneous processes of condensate growth and recrystallization. It is stated that heating due to Mo condensates bombardment by eigen ions has a dominating effect on crystal structure characteristics, and radiation-induced effects are manifested mainly in increase of distortion of crystal lattice coatings