Published April 10, 2007 | Version v1
Journal article

Plasma-assisted MBE growth of nitride-based intersubband detectors

  • 1. Equipe mixte CEA-CNRS-UJF Nanophysique et Semiconducteurs, DRFMC/SP2M/PSC, CEA-Grenoble, 17 rue des Martyrs, 38054 Grenoble cedex 9 (France)
  • 2. University of Neuchatel, 2000 Neuchatel (Switzerland)

Description

In this work, we present the plasma-assisted molecular-beam epitaxy of quantum well infrared photodetector structures, including the Si-doped GaN/AlN short-period superlattice of the active region, AlGaN claddings and integration of the final device. Photovoltage measurements of complete devices reveal a narrow (∼90 meV) detection peak at 1.39 μm at room temperature

Additional details

Identifiers

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
893
Journal Issue
1
Journal Page Range
p. 481-482
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
28. international conference on the physics of semiconductors
Acronym
ICPS 2006
Dates
24-28 Jul 2006
Place
Vienna (Austria)

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
39072057
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ALUMINIUM NITRIDES; CLADDING; CRYSTAL GROWTH; DOPED MATERIALS; GALLIUM NITRIDES; MOLECULAR BEAM EPITAXY; PHOTODETECTORS; PLASMA; QUANTUM WELLS; SEMICONDUCTOR MATERIALS; SUPERLATTICES
Descriptors DEC
ALUMINIUM COMPOUNDS; CRYSTAL GROWTH METHODS; DEPOSITION; EPITAXY; GALLIUM COMPOUNDS; MATERIALS; NANOSTRUCTURES; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SURFACE COATING

Optional Information

Notes
(c) 2007 American Institute of Physics