Published September 2002
| Version v1
Journal article
The cluster source and its application
Creators
- 1. Beijing Univ., Beijing (China). Inst. of Heavy Ion Physics, Physics College
Description
A cluster machine which can produce cluster of different size by adjusting evaporation or sputtering parameter is introduced here. It is shown the novel properties of those cluster films and its applications in optical and magnetic films
Additional details
Publishing Information
- Journal Title
- Nuclear Techniques
- Journal Volume
- 25
- Journal Issue
- 9
- Journal Page Range
- p. 699-702
- ISSN
- 0253-3219
INIS
- Country of Publication
- China
- Country of Input or Organization
- China
- INIS RN
- 34068433
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- EVAPORATION; FILMS; PARTICLE SOURCES; SIZE; SOLID CLUSTERS; SPUTTERING; USES
- Descriptors DEC
- PHASE TRANSFORMATIONS; RADIATION SOURCES