Oxygen diffusion into oxygen-deficient Ba2YCu3O/sub 7-//sub x/ films during plasma oxidation
Creators
- 1. Fujitsu Laboratories Ltd., 10-1 Morinosato-Wakamiya, Atsugi 243-01, Japan
Description
We studied the speed of oxygen diffusion into deoxygenated Ba2 YCu3 O/sub 7-//sub x/ films during plasma oxidation. The films were deoxygenated by annealing in N2 or Ar and treated in an oxygen plasma. The sample was below 160 0C during the plasma oxidation. The deoxygenated film was tetragonal and exhibited semiconductivity. Plasma oxidation changed the crystal structure of the film from tetragonal to orthorhombic, and restored superconductivity and metallic behavior in the oxygen deficient film. The change in composition variable x calculated from the weight gain during plasma oxidation was about 0.6. The effective diffusion constant for oxygen indiffusion estimated from the time dependence of weight gain was on the order of 10/sup -12/ cm2 /s
Additional details
Publishing Information
- Journal Title
- Appl. Phys. Lett.
- Journal Volume
- 53
- Journal Issue
- 9
- Series
- Appl. Phys. Lett.
- Journal Page Range
- 811-813
- ISSN
- 0003-6951
- CODEN
- APPLA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 19104321
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; ARGON; ATOM TRANSPORT; BARIUM OXIDES; COPPER OXIDES; CRYSTAL-PHASE TRANSFORMATIONS; DIFFUSION; HIGH TEMPERATURE; LOW TEMPERATURE; MEDIUM TEMPERATURE; NITROGEN; OXIDATION; OXYGEN; SUPERCONDUCTIVITY; VERY HIGH TEMPERATURE; VERY LOW TEMPERATURE; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; BARIUM COMPOUNDS; CHALCOGENIDES; CHEMICAL REACTIONS; COPPER COMPOUNDS; ELECTRIC CONDUCTIVITY; ELECTRICAL PROPERTIES; ELEMENTS; HEAT TREATMENTS; NEUTRAL-PARTICLE TRANSPORT; NONMETALS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; RADIATION TRANSPORT; RARE GASES; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS