Published August 2, 1999 | Version v1
Journal article

Electrostatic charging effects in fast H+ interactions with thin Ar films

Description

We have studied electron emission, luminescence and sputtering from thin Ar films excited by 2 MeV protons. We varied the voltage, Va, of the anode surrounding the target, which extracts electrons from the film and results in unbalanced positive charges. The resulting large internal electric fields alter sputtering and luminescence. At the beginning of irradiation of a freshly deposited film, we observe that a positive anode voltage of a few hundred volts produces a large, catastrophic increase in sputtering which gradually disappears as irradiation progresses. We discuss the results in terms of dielectric breakdown induced by macroscopic charging associated with deep charged defect sites

Additional details

Identifiers

PII
S0168583X99004292;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
157
Journal Issue
1-4
Journal Page Range
p. 116-120
ISSN
0168-583X
CODEN
NIMBEU

Optional Information

Copyright
Copyright (c) 1999 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.