Estimations of chemical reaction probabilities during collisions of oxygen atoms with 5 eV energy with various organic polymer surfaces

Estimates and comparison of efficiency of etching various polymer materials (capton, epoxide, polybenzimidazole, polyethylene, polymethacrylate, etc.) after bombardment by atomic oxygen with 5 eV energy are carried out. It is shown that the bombardment efficiencies by the mass carry-over through one oxygen atom constitute 10-35%. The above process is accompanied by polymer oxidation with probability of 0.1-0.5 e.i. the main channels of the oxygen atoms consumption are connected with atoms scattering on the surface and with reactions of molecular oxygen formation