Structural and phase transformations in Ni3 Fe alloy at high-dose implantation

Experimental results are presented for structural and phase states forming in surface and subsurface layers of disordered polycrystalline alloy Ni3 Fe under high-dose ion implantation. Ion implantation was carried out using a vacuum-arc source with a multicomponent cathode (89.5 wt% Zr + C + N + O) at accelerating voltage of 50 kV. An implanted atom dose varied within 6.0 x 1016 - 6.0 x 1017 ion x cm-2. It is revealed that in a surface layer the amorphization with simultaneous ZrO2 dispersed particle formation takes place. Below the implanted layer a 10 μ sublayer with a high dislocation density forms