Published September 1987 | Version v1
Journal article

A study on effects of hydrogen ion bombardment on structure and interface of TiC films

  • 1. Academia Sinica, Hefei, AH (China). Inst. of Solid State Physics
  • 2. Academia Sinica, Hefei, AH (China). Inst. of Plasma Physics

Description

The effects of hydrogen ion bombardment on TiC films coated on steel surface were studied. The hydrogen ion beams were supplied by a 5 A pulse ion source with energy of 25 keV and pulse duration of 20 ms. After hydrogen ion bombardment, it is found that: (1) no obvious damage is observed on the surface of the TiC films; (2) the hydrogen content in the TiC film is higher than that in a sample of substrate without coating; (3) the texture which has been built up during previous sputtering process is disappeared; (4) adhesion between the film and substrate is enhanced

Additional details

Publishing Information

Journal Title
Nucl. Fusion Plasma Phys.
Journal Volume
7
Journal Issue
3
Series
Nucl. Fusion Plasma Phys.
Journal Page Range
176-179, 186
ISSN
0254-6086
CODEN
HYDWD