Beam developments for the Harwell microprobe system

A consequence of the rapid development of micron and submicron size electronic devices is the diminished applicability of high energy ion microprobes with their present resolution limitations to the study of such components. Although submicron beams have been reported the available beam current is barely sufficiently for PIXE and is not adequate for RBS. This lack of lateral resolution is due to low beam brightness at the microprobe object and aberrations in the focussing elements. As part of a program to address these problems the Harwell microprobe lens has been relocated on a new 5 MV Laddertron accelerator. The increased brightness and improved stability of this facility has so far led to a reduction in beam size from 3x3 μm2 to about 2x2 μm2. The feasibility of using a liquid metal ion source has been examined with a view to achieving more substantial increases in brightness. While such sources have brightness approximately 105 times greater than conventional gaseous sources the highly divergent nature of the beam presents problems for the beam transport system. The use of a liquid metal source on the accelerator has been successfully demonstrated but it indicates the need for a special low aberration injection lens if brightness is to be maintained. (orig.)