Published July 1990 | Version v1
Journal article

Rapid cleaning of boronized walls with a chlorine/hydrogen glow discharge

  • 1. Nagoya Univ. (Japan). Faculty of Engineering

Description

Chlorine/hydrogen discharge cleaning was developed to remove boron films coated on walls of nuclear fusion devices. The removal rate of boron films (∼0.1 A/s) was an order of magnitude faster than that obtained by conventional hydrogen discharges. Mass spectroscopic measurement revealed that BCl3 is a main volatile product in the removal process. Chlorine contaminants after film removal were cleaned up by additional hydrogen discharges. (author)

Additional details

Publishing Information

Journal Title
Japanese Journal of Applied Physics, Part 1
Journal Volume
29
Journal Issue
7
Series
Jpn. J. Appl. Phys., Part 1.
Journal Page Range
1322-1323
ISSN
0021-4922
CODEN
JAPND