Published September 15, 1989
| Version v1
Journal article
Investigation of the evaporation process conditions on the optical constants of zirconia films
- 1. National Research Council of Canada, Division of Physics, Ottawa, Ontario K1A 0R6, Canada (Canada)
Description
Deposition parameters required for producing zirconia films for use in optical multilayer systems by electron-beam gun evaporation of zirconia and zirconium starting materials were investigated. The optical constants were determined as a function of distance, partial pressure of oxygen, and angle of incidence. The direct and reactive evaporation processes yielded ZrO2 films with refractive indices of 2.08 and 2.14, respectively, for vapor incident on the substrate at normal incidence
Additional details
Publishing Information
- Journal Title
- Applied Optics
- Journal Volume
- 28
- Journal Issue
- 18
- Series
- Appl. Opt.
- Journal Page Range
- 3997-4005
- ISSN
- 0003-6935
- CODEN
- APOPA
INIS
- Country of Publication
- United States
- Country of Input or Organization
- United States
- INIS RN
- 21018377
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- COATINGS; DEPOSITION; INCIDENCE ANGLE; OPTICAL PROPERTIES; THIN FILMS; ZIRCONIUM OXIDES
- Descriptors DEC
- CHALCOGENIDES; FILMS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; TRANSITION ELEMENT COMPOUNDS; ZIRCONIUM COMPOUNDS