Published September 2000 | Version v1
Journal article

RBS study of the interdiffusion effect between CoFe/MnIr layers in tunnel junctions

Description

Spin-dependent tunnel junctions (Si/Al2O3/Ta/NiFe/CoFe/Al2O3/CoFe/MnIr/Ta/TiWN) have been analysed with Rutherford backscattering spectrometry (RBS) using a 1.6 and 2.3 MeV He+ beam at a grazing angle of incidence (from 70 deg. to 82 deg. ). Results for the as-deposited samples and after anneal at 435 deg. C are reported. The interface diffusion between MnIr and CoFe layers after annealing has been studied. A simpler structure (Si/Al2O3/MnIr/CoFe/Ta) was specially prepared to improve the resolution at specific interfaces. The interdiffusion between the MnIr and CoFe layers is correlated with a reduction of the magnetic moment in the annealed samples

Additional details

Identifiers

PII
S0168583X00001592;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
170
Journal Issue
1-2
Journal Page Range
p. 205-210
ISSN
0168-583X
CODEN
NIMBEU

Optional Information

Copyright
Copyright (c) 2000 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.