A study of high temperature oxidation of nickel after ion implantation

Both polycrystalline and single-crystal nickel samples were implanted with 100 keV magnesium or krypton to doses of 1x1017 ions cm-2 and oxidized at 700degC in dry O2. The effects of implantation on the oxidation properties were studied using Rutherford backscattering spectrometry and channelling, secondary ion mass spectrometry and optical microscopy. Results showed different oxidation behaviour between implanted single-crystal and polycrystalline samples. Post-implantation annealing also changed the oxidation results. A major conclusion is that the chemical effect of implanted magnesium in single-crystal nickel is to retard short-term oxidation at 700degC after a post-implantation anneal. Possible mechanisms are discussed. (orig.)