Published October 1980 | Version v1
Journal article

Scanning electron microscope

Creators

Description

The principle underlying the design of the scanning electron microscope (SEM), the design and functioning of SEM are described. Its applications in the areas of microcircuitry and materials science are outlined. The development of SEM in India is reviewed. (M.G.B.)

Additional details

Publishing Information

Journal Title
Instrum. Bull.
Journal Volume
1
Journal Issue
1
Series
Instrum. Bull.
Journal Page Range
5-6

INIS

Country of Publication
India
Country of Input or Organization
India
INIS RN
13703701
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Descriptors DEI
ELECTRON MICROSCOPES; ELECTRON MICROSCOPY; ELECTRON SCANNING; INDIA
Descriptors DEC
ASIA; DEVELOPING COUNTRIES; MICROSCOPES; MICROSCOPY