Published January 1989 | Version v1
Journal article

SRPES analysis of Ga-insulator interfaces for GaAs lateral epitaxial growth

  • 1. Nippon Telegraph and Telephone Corp., Musashino, Tokyo (Japan). Applied Electronics Labs.

Description

The GaAs lateral-epitaxial growth mechanism on insulators is studied using synchrotron radiation photoemission spectroscopy on Ga-insulator interfaces. Interfacial reaction is compared with surface migration of deposited atoms and clusters. Surface-sensitive PES results indicate that among SiO2, Sm2O3, Al2O3, TiO2, MgO and Ta2O5, only TiO2 is heavily oxidized, and that interfacial TiO2 is strongly reduced to Ti metal. The growth model is also discussed. In comparison with the MOCVD GaAs lateral growth rate on these insulators, a close correlation of the surface migration rate of GaAs precipitates with the interfacial reactivity is obtained. (author)

Additional details

Publishing Information

Journal Title
Denki Tsushin Kenkyusho Kenkyu Jitsuyoka Hokoku
Journal Volume
38
Journal Issue
1
Series
Denki Tsushin Kenkyusho Kenkyu Jitsuyoka Hokoku.
Journal Page Range
7-14
ISSN
0415-3200
CODEN
DTKKA