Published 1992
| Version v1
Book
A dedicated synchrotron light source for micromechanics
- 1. Hauptabteilung Zyklotron, Karlsruhe (Germany)
- 2. Kernforschungszentrum Karlsruhe GmbH (Germany). Inst. fuer Mikrostrukturtechnik (IMT)
- 3. Fachhochschule Ostfriesland, Emden (Germany)
Description
The LIGA (Lithographie, Galvanik, Abformtechnik) process has become an accepted technology for fabrication of three-dimensional microstructures. The main process step of this technology is the deep X-ray lithography with synchrotron radiation (SR). For the generation of this characteristic SR a design of storage ring with a fourfold symmetry is proposed. Both the bending magnets and the quadrupoles of the DBA arc are split in order to insert the sextupoles. The design allows the insertion of two wigglers at a later stage each with a length of 3 m. (R.P.) 1 ref.; 6 figs.; 1 tab
Additional details
Publishing Information
- Publisher
- Editions Frontieres.
- Imprint Place
- Paris (France)
- ISBN
- 2-86332-115-3
- Imprint Title
- Proceedings of the 3. European particle accelerator conference. V. 2
- Imprint Pagination
- [941 p.].
- Journal Page Range
- p. 1690-1692.
Conference
- Title
- 3. European particle accelerator conference.
- Acronym
- EPAC 92
- Dates
- 24-28 Mar 1992.
- Place
- Berlin (Germany).
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 24064253
- Subject category
- S43: PARTICLE ACCELERATORS; S43: PARTICLE ACCELERATORS;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- BEAM BENDING MAGNETS; BEAM OPTICS; MICROELECTRONICS; QUADRUPOLES; SPECIFICATIONS; STORAGE RINGS; SYNCHROTRON RADIATION SOURCES
- Descriptors DEC
- EQUIPMENT; MAGNETS; MULTIPOLES; RADIATION SOURCES