Published July 1985 | Version v1
Journal article Metadata-only

On angle polishing for thickness measurement of GaAlAs epitaxial shells

Creators

  • 1. TELEBRAS, Campinas (Brazil). Centro de Pesquisas

Description

no abstract available

Additional details

Additional titles

Original title (Portuguese)
Sobre polimento em angulo para medida de espessura de camadas epitaxiais de GaAlAs

Publishing Information

Journal Title
Cienc. Cult. (Sao Paulo) Supl.
Journal Volume
37
Journal Issue
7
Series
Cienc. Cult. (Sao Paulo) Supl.
Journal Page Range
296
ISSN
0102-2474
CODEN
RRACD

Conference

Title
37. Annual Meeting of the Brazilian Society for the Advancement of Science.
Dates
10-17 Jul 1985.
Place
Belo Horizonte, MG (Brazil).

INIS

Country of Publication
Brazil
Country of Input or Organization
Brazil
INIS RN
17054157
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
ALUMINIUM ARSENIDES; COMPARATIVE EVALUATIONS; EPITAXY; GALLIUM ARSENIDES; INTERFEROMETRY; POLISHING; SCANNING ELECTRON MICROSCOPY; THICKNESS
Descriptors DEC
ALUMINIUM COMPOUNDS; ARSENIC COMPOUNDS; ARSENIDES; DIMENSIONS; ELECTRON MICROSCOPY; EVALUATION; GALLIUM COMPOUNDS; MICROSCOPY; SURFACE FINISHING

Optional Information

Notes
Published in summary form only.