Rutherford backscattering spectrometry, nuclear reaction analysis and their applications to surface analysis

The use of MeV light ion beams for Rutherford backscattering spectrometry and nuclear reaction analysis is discussed. The theory of the processes and the experimental apparatus used at Harwell are briefly described and the capabilities of the techniques for compositional analysis of the surface micron region are considered. Some examples of recent applications of these techniques to materials analysis problems are given to illustrate the wide range of fields in which they may be used. Finally, the characteristics of various frequently-used surface analysis techniques are compared to provide a guide to their utility for the surface micron region. (author)