Published February 1990
| Version v1
Journal article
New surface analysis methods based on ion sputtering
Description
The physical principles are described of some surface-sensitive analytical methods employing mass spectrometry of the neutral particles released from the surface by ion sputtering. Ionization of these particles with laser, electron beam, surface ionization and ionization in the rf discharge is described, and a comparison is given of these methods with secondary-ion mass spectrometry. (author). 2 figs., 1 tab., 62 refs
Additional details
Additional titles
- Original title (Czech)
- Nove metody analyzy povrchu zalozene na iontovem odprasovani
Publishing Information
- Journal Title
- Ceskoslovensky Casopis pro Fyziku
- Journal Volume
- 40
- Journal Issue
- 1
- Series
- Cesk. Cas. Fyz.
- Journal Page Range
- 64-72
- ISSN
- 0009-0700
- CODEN
- CKCFA
INIS
- Country of Publication
- Czech Republic
- Country of Input or Organization
- Serbia and Montenegro
- INIS RN
- 22019340
- Subject category
- S07: ISOTOPES AND RADIATION SOURCES;
- Descriptors DEI
- ELECTRON BEAMS; HIGH-FREQUENCY DISCHARGES; ION BEAMS; LASER RADIATION; MASS SPECTROSCOPY; MATERIALS TESTING; REVIEWS; SPUTTERING; SURFACE IONIZATION
- Descriptors DEC
- BEAMS; DOCUMENT TYPES; ELECTRIC DISCHARGES; ELECTROMAGNETIC RADIATION; IONIZATION; LEPTON BEAMS; PARTICLE BEAMS; RADIATIONS; SPECTROSCOPY; TESTING
Optional Information
- Notes
- English translation available from Nuclear Information Center, 156 16 Prague 5-Zbraslav, Czechoslovakia, at US$ 10 per typewritten page.