Published March 1988 | Version v1
Journal article Metadata-only

Properties of PMMA films modified by 100 keV 4He+ ion bombardment

Creators

  • 1. AN SSSR, Moscow. Inst. Obshchej Fiziki

Description

Changes in properties of PMMA films irradiated with 100 keV 4He+ ions are investigated by IR- and X-ray photoelectron spectroscopy. Film irradiation by 1013-1016 ion/cm2 doses is shown to lead to the destruction of lateral groups in the chains of macromolecules, increase of film density and its refractive index, decrease of the molecular mass of a monomeric chain. The model of ion modification of PMMA films is discussed

Additional details

Additional titles

Original title (Russian)
Свойства пленок PMMA, модифицированных бомбардировкой 100 кэв -

Publishing Information

Journal Title
Mikroehlektronika
Journal Volume
17
Journal Issue
2
Series
Mikroehlektronika.
Journal Page Range
128-132
ISSN
0544-1269
CODEN
MKETA

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
19102234
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
DENSITY; FILMS; HELIUM 4 BEAMS; INFRARED SPECTRA; KEV RANGE 10-100; PHYSICAL RADIATION EFFECTS; PMMA; RADIATION DOSES; REFRACTIVE INDEX; THICKNESS
Descriptors DEC
BEAMS; DIMENSIONS; ENERGY RANGE; ESTERS; ION BEAMS; KEV RANGE; OPTICAL PROPERTIES; ORGANIC COMPOUNDS; ORGANIC POLYMERS; PHYSICAL PROPERTIES; POLYACRYLATES; POLYMERS; POLYVINYLS; RADIATION EFFECTS; SPECTRA