Formation of rare-earth silicides by a new nuclear technique-channeled ion-beam synthesis

A new nuclear technique, channeled ion beam synthesis, has been developed and used to form rare-earth silicides. Channeled ion beam synthesis is much better than the conventional ion beam synthesis. Comprehensive analyses by Rutherford Backscattering and channeling spectrometry, transmission electron microscope, and X-ray diffraction show: the rare-earth silicides had formed by channeled ion beam synthesis with very good crystalline quality (the lowest Xmin of ErSi1.7 is 1.5%)