Characteristics of electrostatic gas micro-pump with integrated polyimide passive valves

We report on the fabrication and characterization of electrostatic gas micro-pumps integrated with polyimide check valves. Touch-mode capacitance actuation, enabled by a fixed silicon electrode and a metal/polyimide diaphragm, creates the suction and push-out of the ambient gas; the gas flow is rectified by the check valves located at the inlet and outlet of the pump. The fabricated pumps were tested with various actuation voltages at different frequencies and duty cycles; an emphasis was placed on investigating the effect of valve flow conductance on the gas pumping characteristics. The pump with higher valve conductance could increase the operating frequency of the pump and affect the pumping characteristics from a pulsating flow to a continuous flow, leading to a higher gas flow rate. This electrostatic pump has a flow control resolution of 1 µL min⁻¹; it could generate a gas flow up to 106 µL min⁻¹. (paper)