Hydrogen Plasma Generation with 200 MHz RF Ion Source

The ion source for the system is required to be rugged with 2000 hours maintenance free operation time because it is installed in the vessel filled with SF6 gas at the pressure of 10 bar. A 200 MHz RF ion source is considered as an ion source. It is a simple construction and provides long life operation. The specifications of the ion source are 5 kV extraction voltage and 1 mA beam current referenced to the proton. RF ion source has been developed and undergone a performance test. Results of the test are presented. 200 MHz RF ion source is designated and manufactured. First of all test stand test of ion source are set up for a performance test of ion source. It includes a RF ion source, a 200-MHz RF system, beam extraction system, vacuum system, beam extraction system, and beam diagnostic system. At pressure of 1.2E-5 torr, hydrogen plasma is generated with net RF power 70 W. Pyrex tube surrounded by an inductive coil takes the role of vessel and discharge is enhanced with field of permanent magnets