Published November 1974
| Version v1
Journal article
Drive-in diffusion studies on antimony and gallium implanted into silicon
- 1. Kozponti Fizikai Kutato Intezet, Budapest (Hungary)
- 2. California Inst. of Tech., Pasadena (USA)
Description
no abstract available
Additional details
Publishing Information
- Journal Title
- Vide
- Journal Volume
- 29
- Journal Issue
- 174
- Series
- Vide.
- Journal Page Range
- 416-418
Conference
- Title
- 4. International congress AVISEM 74. Application of electronic and ionic processes.
- Dates
- 08 Oct 1974.
- Place
- Toulouse, France.
INIS
- Country of Publication
- France
- Country of Input or Organization
- France
- INIS RN
- 6197557
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANTIMONY IONS; GALLIUM IONS; ION IMPLANTATION; SILICON
- Descriptors DEC
- CHARGED PARTICLES; ELEMENTS; IONS; SEMIMETALS