Published November 1974 | Version v1
Journal article

Drive-in diffusion studies on antimony and gallium implanted into silicon

  • 1. Kozponti Fizikai Kutato Intezet, Budapest (Hungary)
  • 2. California Inst. of Tech., Pasadena (USA)

Description

no abstract available

Additional details

Publishing Information

Journal Title
Vide
Journal Volume
29
Journal Issue
174
Series
Vide.
Journal Page Range
416-418

Conference

Title
4. International congress AVISEM 74. Application of electronic and ionic processes.
Dates
08 Oct 1974.
Place
Toulouse, France.

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
6197557
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANTIMONY IONS; GALLIUM IONS; ION IMPLANTATION; SILICON
Descriptors DEC
CHARGED PARTICLES; ELEMENTS; IONS; SEMIMETALS