Published June 5, 2012
| Version v1
Journal article
Optical and electronic properties of Ti1-xNbxN thin films
Creators
- 1. Centre for Nanotechnology, School of Engineering Sciences and Technology, University of Hyderabad, Hyderabad-500 046 (India)
- 2. School of Physics, Centre for Nanotechnology, University of Hyderabad, Hyderabad-500 046 (India)
- 3. School of Physics, University of Hyderabad, Hyderabad-500 046 (India)
Description
Ti1-xNbxN thin films with x=0, 0.26, 0.41, 0.58 and 1 were deposited on silicon (311) substrate by RF magnetron sputtering. The dielectric functions of these films were calculated by fitting measured reflectance spectra to the Drude-Lorentz model. The measured reflectance spectra exhibits a minimum in the visible region and this feature shifts to higher energy (shorter wavelength) with increase in x. The observed behavior can be modeled as the response of four Lorentz oscillators. The real part of the dielectric function is characterized by a screened plasma energy of 2.26 eV for x=0 which increased to 2.80 eV for x=0.58 in the Ti1-xNbxN film.
Additional details
Identifiers
- DOI
- 10.1063/1.4710195;
Publishing Information
- Journal Title
- AIP Conference Proceedings
- Journal Volume
- 1447
- Journal Issue
- 1
- Journal Page Range
- p. 699-700
- ISSN
- 0094-243X
- CODEN
- APCPCS
Conference
- Title
- 56. DAE solid state physics symposium 2011
- Dates
- 19-23 Dec 2011
- Place
- Kattankulathur, Tamilnadu (India)
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 43094242
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- DEPOSITION; DIELECTRIC MATERIALS; INFRARED SPECTRA; NIOBIUM NITRIDES; PERMITTIVITY; PLASMA; REFLECTIVITY; SILICON; SPECTRAL REFLECTANCE; SPUTTERING; SUBSTRATES; THIN FILMS; TITANIUM NITRIDES; ULTRAVIOLET SPECTRA
- Descriptors DEC
- DIELECTRIC PROPERTIES; ELECTRICAL PROPERTIES; ELEMENTS; FILMS; MATERIALS; NIOBIUM COMPOUNDS; NITRIDES; NITROGEN COMPOUNDS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; PNICTIDES; REFRACTORY METAL COMPOUNDS; SEMIMETALS; SPECTRA; SURFACE PROPERTIES; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- (c) 2012 American Institute of Physics