Determination of inorganic trace impurities in high purity water by ICP-MS

A technique is developed for the determination of trace impurities in high purity water, using internal calibration standards and an experimental ICP-MS facility. The achieved detection limits are shown to vary from 20 to 30 pg/ml for Co and U, respectively. The work is the first stage of investigations aimed at development of a highly sensitive technique for the determination of trace impurities in initial materials for semiconductor production. 8 refs., 1 tab., 4 figs